Lam Research and imec are expanding their joint R&D collaboration with two new directions: advancing manufacturing readiness of 3D integration and advanced packaging, and advancing Aether® dry resist applications in imec's high-NA EUV research environment.
Researchers from KAIST, TDS Innovation, Hanyang University, UNIST and other institutions published a paper in Nature proposing an etching-flux-mediated single-nucleus nucleation method for 2D semiconductors that deterministically positions a single nucleation event at a designated location. Conventional strategies can only control nucleation density and achieve area-selective growth, but cannot determine where an individual nucleus lands within the growth area. Published in October 2026, the paper is open access.
Lam Research has broken ground on a new laboratory expansion at its R&D center in Tualatin, Oregon. Once complete, the facility will add 120,000 square feet, expanding cleanroom space by more than 50%, with operation expected in 2028.