Beyond The EPE Budget: Building The Next Generation Of Computational Lithography
At the SPIE Photomask and EUV Lithography conference, a panel of experts from IBM, Carl Zeiss SMT, Micron, ASML, Tekscend and Applied Materials said edge placement error (EPE) has risen from a single lithography metric to a system-level problem, with contributions from masks, scanners, photoresist, etch, metrology and OPC.