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Semiconductor Engineering Chips and Packaging· Technical Paper Link·· 5 h前AI score41

Single-Crystal High-κ Dielectric Enables Low-Power 2D CFETs (NUS et al.)

Single-Crystal High-κ Dielectric Enables Low-Power 2D CFETs (NUS et al.)

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A National University of Singapore team, together with Nexstrom, published research in Nature demonstrating wafer-scale, transferable single-crystal anatase titanium dioxide dielectrics integrated via van der Waals bonding with 2D transition metal dichalcogenides. The resulting nearly perfect 2D-dielectric interface brings subthreshold swing close to the thermodynamic limit, with record-low hysteresis in n-type and p-type enhancement-mode transistors. CFET inverters built on this achieve high voltage gain and large noise margins, with static power consumption below the picowatt level.

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Researchers led by the National University of Singapore  and Nexstrom published “Low-power 2D CFETs using single-crystal high-κ dielectrics.”

Abstract Excerpt:
“Here we demonstrate that a wafer-scale, transferable, single-crystal anatase titanium dioxide dielectric can be van der Waals integrated with 2D transition metal dichalcogenides. The obtained pristine 2D-dielectric interface enables subthreshold swing close to the thermal limit, record-low hysteresis and well-matched transfer characteristics for both n- and p-type enhancement-mode field-effect transistors. Building on this, we demonstrate complementary field-effect transistors, whose inverters achieve high voltage gain and large noise margins with subpicowatt static power consumption. These results highlight the promise of 2D semiconductors for ultra-low-power operation.”

Find the technical paper here. November 2026

Yang, Ni, Ji Zhang, Yu-Cheng Lu, et al. “Low-power 2D CFETs using single-crystal high-κ dielectrics.” Nature (2026). https://doi.org/10.1038/s41586-026-11272-2=

Source: Semiconductor Engineering Chips and Packaging · semiengineering.com