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NUS Team Achieves Single-Crystal High-κ Dielectric 2D CFET

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The National University of Singapore, together with Nexstrom, published research in Nature demonstrating wafer-scale, transferable single-crystal anatase titanium dioxide dielectrics van der Waals integrated with 2D transition metal dichalcogenides. Thanks to a nearly perfect 2D-dielectric interface, devices achieve subthreshold swing close to the thermodynamic limit, and n-type and p-type enhancement-mode transistors reach record-low hysteresis. A CFET inverter built on this technology delivers high voltage gain and large noise margin, with static power consumption below the picowatt level, offering a new technical path for low-power 2D transistor integration.

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11/12
  1. Semiconductor Engineering Chips and Packaging
    Single-Crystal High-κ Dielectric Enables Low-Power 2D CFETs (NUS et al.)

    A National University of Singapore team, together with Nexstrom, published research in Nature demonstrating wafer-scale, transferable single-crystal anatase titanium dioxide dielectrics integrated via van der Waals bonding with 2D transition metal dichalcogenides. The resulting nearly perfect 2D-dielectric interface brings subthreshold swing close to the thermodynamic limit, with record-low hysteresis in n-type and p-type enhancement-mode transistors. CFET inverters built on this achieve high voltage gain and large noise margins, with static power consumption below the picowatt level.

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