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Semiconductor Engineering Chips and Packaging· Technical Paper Link·· 13 days agoAI score30

Backside Clock Meshes Cut Skew and Power in 2nm Nanosheets (UCSC)

Backside Clock Meshes Cut Skew and Power in 2nm Nanosheets (UCSC)

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A UC Santa Cruz team released the first design space exploration of backside clock meshes, implemented on OpenROAD and GT2N using a 2nm GAAFET BSPDN process. Backside power delivery provides thick, low-resistance metal layers on the wafer's backside, reducing clock skew and power; since flip-flops stay on the frontside, all connections run through silicon vias. The paper was released on arXiv in October 2026 (arXiv:2610.02401).

Article · English

Researchers at the University of California, Santa Cruz published a technical paper titled “Design Space Exploration of Backside Clock Meshes for 2 nm GAAFET BSPDN Technology.”

Abstract Excerpt: “Clock meshes are used in high-performance VLSI designs to minimize skew and tolerate on-chip variation, but they spend scarce routing resources on premium metal layers. Backside power delivery creates a new option: it adds thick, low-resistance metal layers on the back of the wafer, and the power grid does not consume all of them. Flip-flops remain on the frontside; a backside mesh therefore cannot drive them directly, and every connection passes through a through-silicon via. We present the first design-space exploration of backside clock meshes, implemented in OpenROAD on GT2N, a 2 nm nanosheet technology.”

Find the technical paper here. October 2026.

Ali, Wajid, Muhammad Hadir Khan, Dalton Gaddy, and Matthew Guthaus. “Design Space Exploration of Backside Clock Meshes for 2 nm GAAFET BSPDN Technology.” arXiv preprint arXiv:2610.02401 (October 2026). https://doi.org/10.48550/arXiv.2610.02401

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Source: Semiconductor Engineering Chips and Packaging · semiengineering.com