Industry advances 12-inch large mask roadmap

On industry progress toward 12-inch (roughly 6x12-inch) large mask blanks, the latest 15th annual eBeam Initiative Luminaries survey shows that 66% of the experts surveyed predict the industry will adopt this large mask format within the next decade. In earlier discussions, large masks were still an industry vision; they have now entered a concrete roadmap stage: TSMC and ASML have announced they aim to build a 12-inch mask pilot line by 2031. Experts believe that adopting large masks can bring about a 40% productivity improvement. In addition, the survey shows 68% of respondents expect purchases of lithography mask etching systems to increase over the next three years, mainly to meet compatibility requirements for new High-NA mask materials. Current status: large masks have formally moved from the vision stage to an industry roadmap, with leading vendors having given clear timelines.

AI overview of reporting · Updated 3 h前